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OMBD |
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xpswhd |
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2021/09/07 3:27 pm |
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<À¯Àú ¸ñ·Ï>
½´ÆÛÀ¯Àú: ÃÖÁøÇõ
À¯Àú: ¼ÕÁ¾Çö, ÀÓÇü¼·, ±è½ÂÇö, ¹Ú»ó½Ä, ÇѼ¼±³, Á¤¼¼ÀÎ, ±è¼øÈ¿ (³ë¿ë¿µ ±³¼ö´Ô ¿¬±¸½Ç)
<À¯Áö º¸¼ö ³»¿ª>
2014
- Sample plate ÀçÁÖ¹®
- Software Åë½Å ¿¡·¯ ¹æ¹® Á¡°Ë ¹× ÇØ°á
- OC Power supply ±³Ã¼
- Metal chamber sensor line ±³Ã¼
- Aligner sensor Á¡°Ë ¹× ÇØ°á
2015
-OC power supply Á¡°Ë ¹× ±³Ã¼
-In-vacuum cable Á¡°Ë ¹× ±³Ã¼
2016
-Chiller·Î ¿¬°áµÇ´Â water flow valve Á¡°Ë
-Áß¿Â cell (#7,8,9) ÆÄ¿ö ÀÌ»ó Á¡°Ë ¹× ±³Ã¼
-In-vacuum cable ±³Ã¼
-Sub shutter motor drive È®ÀÎ ¹× ±³Ã¼
2017
-¾øÀ½
2018
-°Ç¹° õÀå ´©¼ö·Î ÀÎÇÑ Aligner Á¡°Ë
2019
-ÆßÇÁ ¹× Roughing line Á¡°Ë ¹× ±³Ã¼
-Aligner movement Á¡°Ë
-Á¤ÀüÀ¸·Î ÀÎÇÑ venting line error Á¡°Ë
2020
-ÀÌ»ó¾øÀ½
2021. 09
-ÀÌ»ó¾øÀ½ |
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